Title: | Linear and traceable scales for nanometrology Lineaariset ja jäljitettävät asteikot nanometrologiassa |
Author(s): | Seppä, Jeremias |
Date: | 2014 |
Language: | en |
Pages: | 82 + app. 64 |
Department: | Signaalinkäsittelyn ja akustiikan laitos Department of Signal Processing and Acoustics |
ISBN: | 978-952-60-5943-3 (electronic) 978-952-60-5942-6 (printed) |
Series: | Aalto University publication series DOCTORAL DISSERTATIONS, 176/2014 |
ISSN: | 1799-4942 (electronic) 1799-4934 (printed) 1799-4934 (ISSN-L) |
Supervising professor(s): | Ikonen, Erkki, Prof., Aalto University, Department of Signal Processing and Acoustics, Finland |
Thesis advisor(s): | Lassila, Antti, Dr., MIKES, Finland |
Subject: | Physics |
Keywords: | nanometrology, interferometry, nonlinearity, linear, diffractometry, laser, capacitive, metrology, AFM, SSWLI, nanometrologia, interferometria, epälineaarisuus, lineaarinen, diffraktometria, laser, metrologia, kapasitiivinen |
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Abstract:Menetelmät luotettavien ja toistettavien asteikkojen tuottamiseksi ovat mittaustekniikan keskeisiä työkaluja. Tarkkoja, SI-järjestelmän perusyksiköiden määritelmiin suoraan jäljitettäviä etäisyys-, koko- ja muotomittauksia voidaan tehdä laserinterferometria ja -diffraktometria käyttäen. |
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Parts:[Publication 1]: J. Seppä, V. Korpelainen, M. Merimaa, G. B. Picotto and A. Lassila, A method for linearization of a laser interferometer down to the picometre level with a capacitive sensor, Measurement Science and Technology 22, 094027 (2011). DOI:10.1088/0957-0233/22/9/094027 View at Publisher [Publication 2]: M. Pisani, A. Yacoot, P. Balling, N. Bancone, C. Birlikseven, M. Ҫelik, J. Flügge, R. Hamid, P. Köchert, P. Kren, U. Kuetgens, A. Lassila, G. B. Picotto, E. Şahin, J. Seppä, M. Tedaldi and C. Weichert, Comparison of the performance of the next generation of optical interferometers, Metrologia 49, 455–467 (2012). DOI:10.1088/0026-1394/49/4/455 View at Publisher [Publication 3]: V. Korpelainen, A. Iho, J. Seppä and A. Lassila, High accuracy laser diffractometer: angle-scale traceability by the error separation method with a grating, Measurement Science and Technology 20, 084020 (2009). DOI:10.1088/0957-0233/20/8/084020 View at Publisher [Publication 4]: V. Korpelainen, J. Seppä and A. Lassila, Design and characterization of MIKES metrological atomic force microscope, Precision Engineering 34, 735–44 (2010). DOI: doi:10.1016/j.precisioneng.2010.04.002 View at Publisher [Publication 5]: J. Seppä, V. Korpelainen, S. Bergstrand, H. Karlsson, L. Lillepea and A. Lassila, Intercomparison of lateral scales of scanning electron microscopes and atomic force microscopes in research institutes in Northern Europe, Measurement Science and Technology 25, 044013 (2014). DOI:10.1088/0957-0233/25/4/044013 View at Publisher [Publication 6]: J. Seppä, I. Kassamakov, V. Heikkinen, A. Nolvi, T. Paulin, A. Lassila and E. Hæggström, Quasidynamic calibration of stroboscopic scanning white light interferometer with a transfer standard, Optical Engineering 52, 124104 (2013). DOI:10.1117/1.OE.52.12.124104 View at Publisher |
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