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Grass-like Aluminum Oxide: Fabrication and Applications

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dc.contributor Aalto-yliopisto fi
dc.contributor Aalto University en
dc.contributor.advisor Kauppinen, Christoffer, Dr., Aalto University, Finland
dc.contributor.author Isakov, Kirill
dc.date.accessioned 2021-04-26T12:30:24Z
dc.date.available 2021-04-26T12:30:24Z
dc.date.issued 2021
dc.identifier.isbn 978-952-64-0344-1 (electronic)
dc.identifier.isbn 978-952-64-0343-4 (printed)
dc.identifier.issn 1799-4942 (electronic)
dc.identifier.issn 1799-4934 (printed)
dc.identifier.issn 1799-4934 (ISSN-L)
dc.identifier.uri https://aaltodoc.aalto.fi/handle/123456789/107060
dc.description Defence is held on 7.5.2021 12:00 – 15:00 https://aalto.zoom.us/j/66890081498
dc.description.abstract This thesis presents grass-like alumina (GLA) – a new nanoporous coating with atomiclayer deposition-based fabrication methodology. GLA inherits valuable features of atomic layer deposition: scalability to coating hundreds of components in parallel and ability to uniformly coat substrates with extremely complicated topographies. Unique features of GLA are gradient refractive index, and high roughness and surface area.Fabrication methods for GLA are developed in this work and presented in detail. Several applications of GLA are introduced and divided into two main areas: antireflective coatings and nanoscale surface area enhancement method. Gradient refractive index of GLA spanning from 1.6 to 1 makes it a perfect match for reducing reflection from glass and plastic substrates. Transmission for doubleside coated glass achieves remarkable 99.3% average value over entire visible region of light spectrum at normal incidence. The positive effect is even more pronounced at higher incidence angle – GLA-coated glass transmits more light at 65° incidence than uncoated glass at normal incidence. Such performance makes GLA an excellent broadband and omnidirectional anti-reflective coating. Due to the fact that it is also anon-line-of-sight coating which can be applied in a batch process, GLA is a new strong contestant in the field of anti-reflective coatings. Rough surface of GLA enabled upgrading the developed anti-reflective coating with superhydrophobic properties. This was achieved by adding a thin top layer of a low surface energy material – fluoropolymer. Water contact angles of over 170° were achieved demonstrating excellent superhydrophobic behavior without any loss in antireflective properties. Superhydrophobic properties are known to enable self-cleaning capabilities, which are very valuable for coating exposed to atmospheric effects. Enhancement of surface area of a functional material by a GLA substructure has been first demonstrated with improving absorption of black silicon-NbN complex in the infrared region of light spectrum. The same principle was used to develop a high surface area electrode composed of GLA sandwiched between two thin TiN layers.The electrode has shown to be highly conductive despite containing dielectric alumina, and was able to increase capacitance of a porous silicon supercapacitor by up to 4 times. The whole electrode is a nanoscale structure, which allows its combination with existing 3D structures utilized in supercapacitors, solid capacitors and batteries. en
dc.format.extent 64 + app. 56
dc.format.mimetype application/pdf en
dc.language.iso en en
dc.publisher Aalto University en
dc.publisher Aalto-yliopisto fi
dc.relation.ispartofseries Aalto University publication series DOCTORAL DISSERTATIONS en
dc.relation.ispartofseries 53/2021
dc.relation.haspart [Publication 1]: Christoffer Kauppinen, Kirill Isakov, and Markku Sopanen. Grasslike Alumina with Low Refractive Index for Scalable, Broadband, Omnidirectional Antireflection Coatings on Glass Using Atomic Layer Deposition. ACS Applied Materials & Interfaces, 9, 17, 15038–15043, April 2017. Full text in Acris/Aaltodoc: http://urn.fi/URN:NBN:fi:aalto-202103312722. DOI: 10.1021/acsami.7b01733
dc.relation.haspart [Publication 2]: Kirill Isakov, Alexander Pyymaki Perros, Ali Shah, and Harri Lipsanen. Wide-band ’black silicon’ with atomic layer deposited NbN. Nanotechnology, 29, 33, 335303, June 2018. Full text in Acris/Aaltodoc: http://urn.fi/URN:NBN:fi:aalto-201806253483. DOI: 10.1088/1361-6528/aac738
dc.relation.haspart [Publication 3]: Kirill Isakov, Christoffer Kauppinen, Sami Franssila, and Harri Lipsanen. Superhydrophobic Antireflection Coating on Glass Using Grasslike Alumina and Fluoropolymer. ACS Applied Materials & Interfaces, 12, 44, 49957-49962, October 2020. Full text in Acris/Aaltodoc: http://urn.fi/URN:NBN:fi:aalto-2020113020611. DOI: 10.1021/acsami.0c12465
dc.relation.haspart [Publication 4]: Kirill Isakov, Olli Sorsa, Taina Rauhala, Santeri Saxelin, Christoffer Kauppinen, Tanja Kallio, and Harri Lipsanen. Grass-Like Alumina to Enhance the Performance of Porous Silicon for On-Chip Micro- Supercapacitors. Submitted to ACS Applied Energy Materials, 21 October 2020
dc.subject.other Electrical engineering en
dc.title Grass-like Aluminum Oxide: Fabrication and Applications en
dc.type G5 Artikkeliväitöskirja fi
dc.contributor.school Sähkötekniikan korkeakoulu fi
dc.contributor.school School of Electrical Engineering en
dc.contributor.department Elektroniikan ja nanotekniikan laitos fi
dc.contributor.department Department of Electronics and Nanoengineering en
dc.subject.keyword ALD en
dc.subject.keyword nanomaterials en
dc.subject.keyword antireflective coating en
dc.subject.keyword gradient refractive index en
dc.subject.keyword superhydrophobic en
dc.subject.keyword supercapacitors en
dc.subject.keyword aluminum oxide en
dc.identifier.urn URN:ISBN:978-952-64-0344-1
dc.type.dcmitype text en
dc.type.ontasot Doctoral dissertation (article-based) en
dc.type.ontasot Väitöskirja (artikkeli) fi
dc.contributor.supervisor Lipsanen, Harri, Prof., Aalto University, Department of Electronics and Nanoengineering, Finland
dc.opn Poxson, David, Dr., Linköping University, Sweden
dc.contributor.lab Nanoscience and Advanced Materials en
dc.rev Putkonen, Matti, Prof., University of Helsinki, Finland
dc.rev Szeghalmi, Adriana, Dr., Friedrich Schiller University Jena, Germany
dc.date.defence 2021-05-07
local.aalto.acrisexportstatus checked 2021-05-17_1525
local.aalto.infra OtaNano
local.aalto.infra OtaNano - Aalto Nanofab/Micronova
local.aalto.infra OtaNano - Nanomicroscopy Center
local.aalto.formfolder 2021_04_26_klo_15_24
local.aalto.archive yes

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