Ambient environmental effects in micro/nano handling



Title:	Ambient environmental effects in micro/nano handling
Author(s):	Zhou, Quan ; Chang, Bo ; Koivo, Heikki N.
Date:	2004
Language:	en
Pages:	146-151
Series:	4th International Workshop on Microfactories - IWMF 2004, Shanghai, China, October 15-17, 2004
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Citation: Zhou , Q , Chang , B & Koivo , H N 2004 , Ambient environmental effects in micro/nano handling . in 4th International Workshop on Microfactories - IWMF 2004, Shanghai, China, October 15-17, 2004 . USTC , Shanghai, China , pp. 146-151 .

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