Coupled micromechanical silicon resonators for high frequencies



Title:	Coupled micromechanical silicon resonators for high frequencies
Author(s):	Lamminmäki, Tuomas
Date:	2002
Language:	en
Pages:	91
Department:	Sähkö- ja tietoliikennetekniikan osasto
Major/Subject:	Mittaustekniikka
Supervising professor(s):	Tittonen, Ilkka
Thesis advisor(s):	Oja, Aarne
Keywords:	RF-MEMS, RF-resonator, electromechanical coupling, micromechanics, coupled systems
	OEVS yes
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Permanent link to this item: http://urn.fi/URN:NBN:fi:aalto-202104145488 Email this Export to RefWorks QR Code Print BibTex Tweet