Title:Atomic layer deposition in fabrication of micro- and nanodevices
Author(s):Rontu, VilleDate:2020Series:Aalto University publication series DOCTORAL DISSERTATIONS, 182/2020School of Chemical Technology | Doctoral thesis (article-based) | Defence date: 2020-12-11
Title:Atomic Layer Deposition of Thermoelectric ZnO Thin Films
Author(s):Tynell, TommiDate:2013Series:Aalto University publication series DOCTORAL DISSERTATIONS, 194/2013School of Chemical Technology | Doctoral thesis (article-based) | Defence date: 2013-12-13