Title:Amorphous molybdenum-based thin films for surface micromachining
Author(s):Laamanen, MariDate:2017Series:Aalto University publication series DOCTORAL DISSERTATIONS, 23/2017, VTT Science, 147School of Electrical Engineering | Doctoral thesis (monograph) | Defence date: 2017-03-10
Title:Atomic layer deposition in fabrication of micro- and nanodevices
Author(s):Rontu, VilleDate:2020Series:Aalto University publication series DOCTORAL DISSERTATIONS, 182/2020School of Chemical Technology | Doctoral thesis (article-based) | Defence date: 2020-12-11
Title:Atomic Layer Deposition of Thermoelectric ZnO Thin Films
Author(s):Tynell, TommiDate:2013Series:Aalto University publication series DOCTORAL DISSERTATIONS, 194/2013School of Chemical Technology | Doctoral thesis (article-based) | Defence date: 2013-12-13