Title:Nickel: A very fast diffuser in silicon
Author(s):Lindroos, Jeanette; Fenning, David P.; Backlund, Daniel J.; Verlage, Erik; Gorgulla, Angelika; Estreicher, Stefan K.; Savin, Hele; Buonassisi, TonioDate:2013Series:Journal of Applied Physics, Volume 113, Number 20School of Electrical Engineering