Title:Atomic layer deposition in fabrication of micro- and nanodevices
Author(s):Rontu, VilleDate:2020Series:Aalto University publication series DOCTORAL DISSERTATIONS, 182/2020School of Chemical Technology | Doctoral thesis (article-based) | Defence date: 2020-12-11
Title:Novel carbon materials and microstructures for electrochemical sensors
Author(s):Heikkinen, Joonas J.Date:2021Series:Aalto University publication series DOCTORAL DISSERTATIONS, 142/2021School of Chemical Technology | Doctoral thesis (article-based) | Defence date: 2021-11-12