Browsing by Keyword "etching"

Title: Aerosol synthesis of carbon nanotubes and nanobuds Author(s): Anisimov, Anton Date: 2010 Series: TKK dissertations, 217 Aalto-yliopiston teknillinen korkeakoulu | Doctoral thesis (article-based)

Title: Development of Electrical and Communications Engineering Author(s): Lindblom, Timo Date: 1999 Helsinki University of Technology | Master's thesis

Title: Effect of Cu impurities on wet etching of Si(110): formation of trapezoidal hillocks Author(s): Hynninen, Teemu; Gosálvez, Miguel A.; Foster, Adam S.; Tanaka, Hiroshi; Sato, Kazuo; Uwaha, Makio; Nieminen, Risto M. Date: 2008 Series: New Journal of Physics, Volume 10, Issue 1 School of Science

Title: Electronic cooling of a submicron-sized metallic beam Author(s): Muhonen, J. T.; Niskanen, A. O.; Meschke, M.; Pashkin, Yu. A.; Tsai, J. S.; Sainiemi, L.; Franssila, S.; Pekola, Jukka P. Date: 2009 Series: Applied Physics Letters, Volume 94, Issue 7 School of Science

Title: Experimental evidence on removing copper and light-induced degradation from silicon by negative charge Author(s): Boulfrad, Yacine; Lindroos, Jeanette; Wagner, Matthias; Wolny, Franziska; Yli-Koski, Marko; Savin, Hele Date: 2014 Series: Applied Physics Letters, Vol. 105, Issue 18 School of Electrical Engineering

Title: Fabrication of GaInAs quantum disks using self-organized InP islands as a mask in wet chemical etching Author(s): Sopanen, Markku; Lipsanen, Harri; Ahopelto, J. Date: 1996 Series: Applied Physics Letters, Volume 69, Issue 26 School of Electrical Engineering

Title: Fabrication of SOI micromechanical devices Author(s): Kiihamäki, Jyrki Date: 2005-04-15 Series: VTT publications, 559 | Doctoral thesis (article-based)

Title: Glass microprocessing for fluidic devices Author(s): Saarela, Ville Date: 2006 Helsinki University of Technology | Master's thesis

Title: ICP processing of gallium nitride and aluminium gallium nitride for laser structures Author(s): Törmä, Pekka Date: 2006 Helsinki University of Technology | Master's thesis

Title: Impact of Standard Cleaning on Electrical and Optical Properties of Phosphorus-Doped Black Silicon Author(s): Pasanen, Toni P.; Laine, Hannu; Vähänissi, Ville; Salo, Kristian; Husein, Sebastian; Savin, Hele Date: 2018-03-19 Series: IEEE Journal of Photovoltaics, Volume 8, issue 3

Title: Interfacial adhesion in metal/polymer systems for electronics Author(s): Ge, Jun Date: 2003-12-05 Series: Report series / Helsinki University of Technology, Laboratory of Electronics Production Technology, 9 | Doctoral thesis (article-based)

Title: Main defect reactions behind phosphorus diffusion gettering of iron Author(s): Schön, Jonas; Vähänissi, Ville; Haarahiltunen, Antti; Schubert, Martin; Warta, Wilhelm; Savin, Hele Date: 2014 Series: Journal of Applied Physics, Volume 116, Number 24 School of Electrical Engineering

Title: Manufacture, observation, and test of membranes with locatable single pores Author(s): Packard, R. E.; Pekola, Jukka P.; Price, P. B.; Spohr, R. N. R.; Westmacott, K. H.; Yu-Qun, Zhu Date: 1986 Series: Review of Scientific Instruments, Volume 57, Issue 8 School of Science

Title: Multiscale modeling of effects due to impurity clustering in semiconductor systems Author(s): Hynninen, Teemu Date: 2008 Series: TKK dissertations, 148 | Doctoral thesis (article-based)

Title: Plasma etch characteristics of aluminum nitride mask layers grown by low-temperature plasma enhanced atomic layer deposition in SF6 based plasmas Author(s): Perros, Alexander; Bosund, Markus; Sajavaara, Timo; Laitinen, Mikko; Sainiemi, Lauri; Huhtio, Teppo; Lipsanen, Harri Date: 2012 Series: Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, Volume 30, Issue 1 School of Electrical Engineering

Title: Plasma Etching for MEMS Devices Author(s): Hotari, Juho Date: 2018-05-09 Sähkötekniikan korkeakoulu | Bachelor's thesis

Title: Processing of gallium nitride blue light emitting diode chips Author(s): Muraleedharan, Sony Date: 2007 Helsinki University of Technology | Master's thesis

Title: Silicon nanograss as micro fuel cell gas diffusion layer Author(s): Scotti, Gianmario; Kanninen, P.; Mäkinen, Mika; Kallio, T.; Franssila, S. Date: 2010 Series: MICRO AND NANO LETTERS, Volume 5, issue 6

Title: Stress distribution in GaN nanopillars using confocal Raman mapping technique Author(s): Nagarajan, S.; Svensk, O.; Lehtola, L.; Lipsanen, Harri; Sopanen, Markku Date: 2014 Series: Applied Physics Letters, Volume 104, Issue 15 School of Electrical Engineering

Title: Synchrotron radiation x-ray topography and defect selective etching analysis of threading dislocations in GaN Author(s): Sintonen, Sakari; Rudzinski, Mariusz; Suihkonen, Sami; Jussila, Henri; Knetzger, Michael; Meissner, Elke; Danilewsky, Andreas; Tuomi, Turkka O.; Lipsanen, Harri Date: 2014 Series: Journal of Applied Physics, Volume 116, Issue 8 School of Electrical Engineering

Browsing by Keyword "etching"

Browsing by Keyword "etching"

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