Title:Application of atomic layer deposited thin films to silicon detectors
Author(s):Ott, JenniferDate:2021Series:Aalto University publication series DOCTORAL DISSERTATIONS, 22/2021, Internal report series / Helsinki Institute of Physics, HIP-2021-01School of Electrical Engineering | Doctoral thesis (article-based) | Defence date: 2021-03-19
Title:Atomic layer deposition in fabrication of micro- and nanodevices
Author(s):Rontu, VilleDate:2020Series:Aalto University publication series DOCTORAL DISSERTATIONS, 182/2020School of Chemical Technology | Doctoral thesis (article-based) | Defence date: 2020-12-11
Title:Atomic layer deposition of complex thin films
Author(s):Ahvenniemi, EskoDate:2016Series:Aalto University publication series DOCTORAL DISSERTATIONS, 215/2016School of Chemical Technology | Doctoral thesis (article-based) | Defence date: 2016-11-25
Title:Atomic Layer Deposition of Thermoelectric ZnO Thin Films
Author(s):Tynell, TommiDate:2013Series:Aalto University publication series DOCTORAL DISSERTATIONS, 194/2013School of Chemical Technology | Doctoral thesis (article-based) | Defence date: 2013-12-13