Title:Evolution of phosphorus-vacancy clusters in epitaxial germanium
Author(s):Vohra, Anurag; Khanam, Afrina; Slotte, Jonatan; Makkonen, Ilja; Pourtois, Geoffrey; Loo, Roger; Vandervorst, WilfriedDate:2019-01-14Series:Journal of Applied Physics, Volume 125, issue 2
Title:He implantation to control B diffusion in crystalline and preamorphized Si
Author(s):Bruno, Elena; Mirabella, Salvo; Priolo, Francesco; Kuitunen, Katja; Tuomisto, Filip; Slotte, Jonatan; Giannazzo, Filippo; Bongiorno, Corrado; Raineri, Vito; Napolitani, EnricoDate:2008Series:Journal of Vacuum Science and Technology. Part B., Volume 26, issue 1