Aaltodoc
→
Browsing by Author

Browsing by Author "Rontu, Ville"

Now showing items 1-10 of 10

Title: Atomic layer deposition in fabrication of micro- and nanodevices Author(s): Rontu, Ville Date: 2020 Series: Aalto University publication series DOCTORAL DISSERTATIONS, 182/2020 School of Chemical Technology | Doctoral thesis (article-based) | Defence date: 2020-12-11
Title: Atomic layer deposition of AlN from AlCl3 using NH3 and Ar/NH3 plasma Author(s): Rontu, Ville; Sippola, Perttu; Broas, Mikael; Ross, Glenn; Lipsanen, Harri; Paulasto-Kröckel, Mervi; Franssila, Sami Date: 2018-01 Series: JOURNAL OF VACUUM SCIENCE AND TECHNOLOGY A, Volume 36, issue 2
Title: Atomic layer deposition of niobium nitride thin films Author(s): Rontu, Ville Date: 2014-12-02 Kemian tekniikan korkeakoulu | Master's thesis
Title: Efficient Catalytic Microreactors with Atomic-Layer-Deposited Platinum Nanoparticles on Oxide Support Author(s): Rontu, Ville; Selent, Anne; Zhivonitko, Vladimir V.; Scotti, Gianmario; Koptyug, Igor V.; Telkki, Ville-Veikko; Franssila, Sami Date: 2017 Series: CHEMISTRY: A EUROPEAN JOURNAL, Volume 23
Title: Elastic and fracture properties of free-standing amorphous ALD Al2O3 thin films measured with bulge test Author(s): Rontu, Ville; Nolvi, Anton; Hokkanen, Ari; Haeggstrom, Edward; Kassamakov, Ivan; Franssila, Sami Date: 2018-04 Series: Materials Research Express, Volume 5, issue 4
Title: Fracture properties of atomic layer deposited aluminum oxide free-standing membranes Author(s): Berdova, Maria; Ylivaara, Oili M. E.; Rontu, Ville; Törmä, Pekka T.; Puurunen, Riikka; Franssila, Sami Date: 2015 Series: JOURNAL OF VACUUM SCIENCE AND TECHNOLOGY A, Volume 33, issue 1
Title: Mechanical properties and reliability of aluminum nitride thin films Author(s): Österlund, Elmeri; Kinnunen, Jere; Rontu, Ville; Torkkeli, Altti; Paulasto-Kröckel, Mervi Date: 2019-01-25 Series: JOURNAL OF ALLOYS AND COMPOUNDS, Volume 772
Title: Scalable Superomniphobic Surfaces Author(s): Rontu, Ville; Jokinen, Ville; Franssila, Sami Date: 2020-02 Series: Journal of Microelectromechanical Systems, Volume 29, issue 1
Title: Titaaninitridiohutkalvojen sovellukset Author(s): Rontu, Ville Date: 2012-11-30 Kemiantekniikan korkeakoulu | Bachelor's thesis
Title: Tribological properties of thin films made by atomic layer deposition sliding against silicon Author(s): Kilpi, Lauri; Ylivaara, Oili M.E.; Vaajoki, Antti; Liu, Xuwen; Rontu, Ville; Sintonen, Sakari; Haimi, Eero; Malm, Jari; Bosund, Markus; Tuominen, Marko; Sajavaara, Timo; Lipsanen, Harri; Hannula, Simo Pekka; Puurunen, Riikka L.; Ronkainen, Helena Date: 2018-01-01 Series: Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films, Volume 36, issue 1