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Browsing by Author "Bespalova, Kristina"

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Title: Atomic layer deposition of AlN using atomic layer annealing - Towards high-quality AlN on vertical sidewalls Author(s): Österlund, Elmeri; Seppänen, Heli; Bespalova, Kristina; Miikkulainen, Ville; Paulasto-Kröckel, Mervi Date: 2021-05-01 Series: Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films, Volume 39, issue 3
Title: Characterization of AlScN-Based Multilayer Systems for Piezoelectric Micromachined Ultrasound Transducer (pMUT) Fabrication Author(s): Bespalova, Kristina; österlund, Elmeri; Ross, Glenn; Paulasto-Kröckel, Mervi; Sebastian, Abhilash Thanniyil; Karuthedath, Cyril Baby; Mertin, Stefan; Pensala, Tuomas Date: 2021-04 Series: Journal of Microelectromechanical Systems
Title: Effect of crystal structure on the Young's modulus of GaP nanowires Author(s): Alekseev, Prokhor A.; Borodin, Bogdan R.; Geydt, Pavel; Khayrudinov, Vladislav; Bespalova, Kristina; Kirilenko, Demid A.; Reznik, Rodion R.; Nashchekin, Alexey; Haggren, Tuomas; Lahderanta, Erkki; Cirlin, George E.; Lipsanen, Harri; Dunaevskiy, Mikhail S. Date: 2021-09-17 Series: Nanotechnology, Volume 32, issue 38
Title: In-Plane AlN-based Actuator: Toward a New Generation of Piezoelectric MEMS Author(s): Bespalova, Kristina; Nieminen, Tarmo; Gabrelian, Artem; Ross, Glenn; Paulasto-Kröckel, Mervi Date: 2023-08 Series: Advanced Electronic Materials
Title: Temperature Stability of Electrode/AlScN Multilayer Systems for pMUT Process Integration Author(s): Bespalova, Kristina; Ross, Glenn; Paulasto-Kröckel, Mervi; Thanniyil, Abhilash Sebastian; Karuthedath, Cyril; Mertin, Stefan; Pensala, Tuomas Date: 2020-09-07 Series: Proceedings of the IEEE International Ultrasonics Symposium, IUS 2020, IEEE International Ultrasonics Symposium
Title: Unlocking the Potential of Piezoelectric Films Grown on Vertical Surfaces for Inertial MEMS Author(s): Gabrelian, Gabrelian; Ross, Glenn; Bespalova, Kristina; Paulasto-Kröckel, Mervi Date: 2022-12 Series: Materials Today Communications, Volume 33