Browsing by Author "Berdova, Maria"

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Title: Adhesion Testing of Atomic Layer Deposited TiO2 on Glass Substrate by the Use of Embedded SiO2 Microspheres Author(s): Lyytinen, Jussi; Berdova, Maria; Franssila, Sami; Koskinen, Jari Date: 2014 Series: JOURNAL OF VACUUM SCIENCE AND TECHNOLOGY A, Volume 32, issue 1
Title: Characterization of thin film adhesion by MEMS shaft-loading blister testing Author(s): Berdova, Maria; Lyytinen, Jussi; Grigoras, Kestuti; Baby, Anu; Kilpi, Lauri; Ronkainen, Helena; Franssila, Sami; Koskinen, Jari Date: 2013 Series: JOURNAL OF VACUUM SCIENCE AND TECHNOLOGY A, Volume 31, issue 3
Title: Fracture properties of atomic layer deposited aluminum oxide free-standing membranes Author(s): Berdova, Maria; Ylivaara, Oili M. E.; Rontu, Ville; Törmä, Pekka T.; Puurunen, Riikka; Franssila, Sami Date: 2015 Series: JOURNAL OF VACUUM SCIENCE AND TECHNOLOGY A, Volume 33, issue 1
Title: Hardness, elastic modulus, and wear resistance of hafnium oxide-based films grown by atomic layer deposition Author(s): Berdova, Maria; Liu, Xuwen; Wiemer, Claudia; Lamperti, Alessio; Tallarida, Grazia; Cianci, Elena; Fanciulli, Marco; Franssila, Sami Date: 2016-09-01 Series: JOURNAL OF VACUUM SCIENCE AND TECHNOLOGY A, Volume 34, issue 5
Title: Micromechanical characterization of ALD thin films Author(s): Berdova, Maria Date: 2015 Series: Aalto University publication series DOCTORAL DISSERTATIONS, 119/2015 School of Chemical Technology | Doctoral thesis (article-based) | Defence date: 2015-10-09
Title: Review Article : Recommended reading list of early publications on atomic layer deposition - Outcome of the "Virtual Project on the History of ALD Author(s): Ahvenniemi, Esko; Akbashev, Andrew R.; Ali, Saima; Bechelany, Mikhael; Berdova, Maria; Boyadjiev, Stefan; Cameron, David C.; Chen, Rong; Chubarov, Mikhail; Cremers, Veronique; Devi, Anjana; Drozd, Viktor; Elnikova, Liliya; Gottardi, Gloria; Grigoras, Kestutis; Hausmann, Dennis M.; Hwang, Cheol Seong; Jen, Shih Hui; Kallio, Tanja; Kanervo, Jaana; Khmelnitskiy, Ivan; Kim, Do Han; Klibanov, Lev; Koshtyal, Yury; Krause, A. Outi I.; Kuhs, Jakob; Kärkkänen, Irina; Kääriäinen, Marja Leena; Kääriäinen, Tommi; Lamagna, Luca; Łapicki, Adam A.; Leskelä, Markku; Lipsanen, Harri; Lyytinen, Jussi; Malkov, Anatoly; Malygin, Anatoly; Mennad, Abdelkader; Militzer, Christian; Molarius, Jyrki; Norek, Małgorzata; Özgit-Akgün, Çaǧla; Panov, Mikhail; Pedersen, Henrik; Piallat, Fabien; Popov, Georgi; Puurunen, Riikka L.; Rampelberg, Geert; Ras, Robin H A; Rauwel, Erwan; Roozeboom, Fred; Sajavaara, Timo; Salami, Hossein; Savin, Hele; Schneider, Nathanaelle; Seidel, Thomas E.; Sundqvist, Jonas; Suyatin, Dmitry B.; Törndahl, Tobias; Van Ommen, J. Ruud; Wiemer, Claudia; Ylivaara, Oili M E; Yurkevich, Oksana Date: 2017-01-01 Series: JOURNAL OF VACUUM SCIENCE AND TECHNOLOGY A, Volume 35, issue 1