Browsing by Author "Mattila, Toni Tuomas"

Galvanic corrosion of structural non-stoichiometric silicon nitride thin films and its implications on reliability of microelectromechanical devices

(2015) Broas, Mikael; Liu, Xuwen; Ge, Yanling; Mattila, Toni Tuomas; Paulasto-Kröckel, Mervi

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A1 Alkuperäisartikkeli tieteellisessä aikakauslehdessä